Leuven pilot line
imec, Leuven, Belgium. Every field this record holds on the site, its note and every source, as the row states them.
The row
- Operator
- imec · company page: imec
- Site
- Leuven pilot line
- Location
- Leuven, Belgium
- Type
- rd-pilot
- Status
- operating
- Wafer
- 300 mm
- Nodes
- not recorded
- First output
- not recorded
- Announced investment
- not recorded
- Map position
- 50.88, 4.7, on the map
R&D pilot line. imec announced on 18 March 2026 that an ASML EXE:5200 High NA EUV system had arrived in its 300mm cleanroom in Leuven. imec publishes no process node for this line, so none is recorded; High-NA EUV is a lithography tool, not a node, and was taken out of the nodes field on 23 August 2026.
Sources
1 source on this row, in the order the row lists them. The order carries no weight.
Imec receives the world's most advanced High NA EUV system · imec-int.com
Capacity statements
No published capacity statement names this site. Blank is unpublished, not zero.
On this record
What this record changed on this row, newest first. Each day is the day this record changed, never the day a publisher said it. Followed: status, first output year, announced investment, operator, name, site and sources.
2026-08-13 · The row entered this record, with the status operating. · Source at entry: Imec receives the world's most advanced High NA EUV system
None of the fields followed here has changed since the row entered this record on 2026-08-13.